A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings
نویسندگان
چکیده
منابع مشابه
A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings
Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite...
متن کاملMeasuring Micro-Friction Torque in MEMS Gas Bearings
An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. With appropriate installation of the sensor and bearings on the table, the engine rotor can be drive...
متن کاملA Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines
In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into a conventional four-beam structure to meet the range requirements for the measurement of both th...
متن کاملDesign, Modeling, and Construction of a New Tactile Sensor for Measuring Contact-Force
This paper presents the design, modeling, and testing of a flexible tactile sensor and its applications. This sensor is made of polymer materials and can detect the 2D surface texture image and contact-force estimation. The sensing mechanism is based on the novel contact deflection effect of a membrane. We measure the deflection of the membrane with measuring the strain in the membrane with emb...
متن کاملDesign and Construction of a New Capacitive Tactile Sensor for Measuring Normal Tactile Force
This paper presents the design, construction and testing of a new capacitive tactile sensor for measurement of normal tactile force. The operation of proposed sensor has been investigated in ASTABLE and MONOSTABLE circuits. According to the results of these circuits the deviation of ASTABLE circuit results is less than MONOSTABLE circuit results. In addition, the results obtained from ASTABLE c...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s131013178